Dual-Mode Temperature And Magnetic Sensor Based On Fbar
| Autor: | Wenkui Lin, Zhong-ming Zeng, Bao-shun Zhang, Xinping Zhang, Xiaofan Yun, Xiaoyi Wang |
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| Rok vydání: | 2021 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry 010401 analytical chemistry Dual mode 020206 networking & telecommunications Thin-film bulk acoustic resonator 02 engineering and technology 01 natural sciences Magnetic sensing 0104 chemical sciences Magnetic field Power consumption 0202 electrical engineering electronic engineering information engineering Optoelectronics business Intensity (heat transfer) |
| Zdroj: | 2020 15th Symposium on Piezoelectrcity, Acoustic Waves and Device Applications (SPAWDA). |
| DOI: | 10.1109/spawda51471.2021.9445517 |
| Popis: | Temperature and magnetic sensors based on MEMS technology benefit from their advantages such as small size, low power consumption and low cost, and are getting more and more attention. The dual-mode sensor based on thin film bulk acoustic resonator (FBAR) uses a Mo/AlN/FeGa sandwich structure as the resonant region, and has two resonant modes: $\mathrm{f}_{\mathrm{A}}$=2.3946 GHz and $\mathrm{f}_{\mathrm{B}}$=2.4628 GHz. The temperature sensitivities of frequency of modes A and B are 120 kHz/oC and 116 kHz/oC, the S11 intensity temperature sensitivities are 0.0014 dB$/^{\circ}$C and 0.0025 dB$/^{\circ}$C, respectively; the frequency magnetic field sensitivities are 2.72 kHz/Oe and 0.47 kHz/Oe, S11 intensity magnetic field sensitivities are 7E-5 dB/Oe and 6E-5 dB/Oe respectively. The dual-mode sensor has several sensing modes, in addition to detecting temperature and magnetic field independently, it can also correct the influence of temperature on magnetic sensing characteristics, which has important application value. |
| Databáze: | OpenAIRE |
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