Investigation of Slurry Flow Behavior in Chemical Mechanical Polishing of Hard to Process Material
| Autor: | Kazutoshi Hotta, Kazusei Tamai, Ken-ichi Ishikawa, Yuichi Tomiie, Michio Uneda, Hitoshi Morinaga |
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| Rok vydání: | 2017 |
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| Zdroj: | Journal of the Japan Society for Precision Engineering. 83:756-761 |
| ISSN: | 1882-675X 0912-0289 |
| DOI: | 10.2493/jjspe.83.756 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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