| Popis: |
Canon succeeded in practical application of InP immersion rating for the first time in the world (Sukegawa et al., 2016). We have developed specialized material for an immersion grating in transmission characteristics and obtained a material comparable to Silicon. The InP immersion grating produced by this material and excellent cutting technology is shorter in wavelength and more practical than the initial InP immersion element and can completely cover the range covered by the Silicon immersion grating. In addition to the already proven around 2.2μm (K-band) and around 1.6μm (H-band), an immersion diffraction element having an ideal grating shape can be provided even at around 1.25μm (J-band). Of course, it is possible to produce not only the immersion grating but also the grism. In this paper, we will also show our latest machining optical devices such as micro-mirrors of Integral Field Units having the same structure as a groove of diffraction grating. |
