Application of Frequency-Change-Type Single-Crystal Silicon Acceleration Sensors to Inclination Angle Sensor
| Autor: | Jiro Terada, Tokiharu Watanabe, Sumio Sugawara |
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| Rok vydání: | 2008 |
| Předmět: |
Physics
Physics and Astronomy (miscellaneous) Silicon business.industry General Engineering General Physics and Astronomy Resonance chemistry.chemical_element Bending Vibrator (mechanical) Finite element method Vibration Acceleration Optics Gravitational field chemistry Computer Science::Networking and Internet Architecture business |
| Zdroj: | Japanese Journal of Applied Physics. 47:4048-4051 |
| ISSN: | 1347-4065 0021-4922 |
| DOI: | 10.1143/jjap.47.4048 |
| Popis: | A new single-crystal silicon inclination sensor using a frequency-change-type acceleration sensor is proposed here. The sensor utilizes the phenomenon showing that the resonance frequency of a bending vibrator changes with axial force. The one-axis sensor element used is composed of one developed bending vibrator, a mass, support bars, and a frame for fixation, and the two-axis sensor element has two vibrators. The volumes of these sensors are about 4.0 ×4.28 ×0.5 and 4.0 ×4.2 ×0.5 mm3, respectively. The first out-of-plane vibration mode in the vibrator is used, and the resonance frequencies of these sensors are about 19.8 and 80.8 kHz, respectively. Acceleration sensors can also be applied to an inclination angle sensor under a gravitational field. The characteristics of the sensors are analyzed using the finite-element method and confirmed experimentally. |
| Databáze: | OpenAIRE |
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