Manufacturing technology of all-solid-state thin-film battery for stand-alone MEMS/sensor application
| Autor: | Takahide Murayama, A. Suzuki, S. Sasaki, K. Suu, Yasuhiro Morikawa, I. Kimura, T. Jimbo |
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| Rok vydání: | 2017 |
| Předmět: |
Microelectromechanical systems
Materials science Silicon 020209 energy Process (computing) chemistry.chemical_element 02 engineering and technology Engineering physics Anode Reliability (semiconductor) chemistry Sputtering All solid state 0202 electrical engineering electronic engineering information engineering Forensic engineering Layer (electronics) |
| Zdroj: | 2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS). |
| DOI: | 10.1109/transducers.2017.7994436 |
| Popis: | All-solid-state thin-film secondary batteries have come to be recognized as one of the key enabling technologies for stand-alone MEMS/sensor devices which are essential for internet of things. However, metallic lithium, which is commonly used as an anode layer in thin-film secondary batteries, has low melting point, so it is not applicable for high-density packaging including high-temperature process such as through-silicon via and solder-reflow process. Silicon is a promising candidate to replace metallic lithium due to high theoretical capacity. In this work, a-Si/LiPON/LiCoO 2 cell which is prepared by sputtering technique confirms good reliability during 150 cycles without cracks, and also presents high-temperature tolerance. |
| Databáze: | OpenAIRE |
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