P-77: Novel and Highly Reliable XeF and KrF Excimer Laser Annealing for Reducing the Cost of Flat Panel Display Equipment
| Autor: | Junichi Fujimoto, Junichi Maekawa, Hiroshi Umeda, Koji Ashikawa, Ryoichi Nohdomi, Takayuki Nagashima, Hakaru Mizoguchi, Yosuke Watanabe, Hisakazu Katsuumi, Akiyoshi Suzuki, Takashi Matsunaga, Satoshi Tanaka, Kaname Imokawa |
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| Rok vydání: | 2017 |
| Předmět: | |
| Zdroj: | SID Symposium Digest of Technical Papers. 48:1532-1535 |
| ISSN: | 0097-966X |
| DOI: | 10.1002/sdtp.11941 |
| Databáze: | OpenAIRE |
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