Reliable and damage-free dry grating etching for the InGaAsP DFB laser diodes

Autor:	Ahn Goo Choo, Taeil Kim, Eun-Hwa Lee, Young Churl Bang, Hyeon-Soo Kim, Jung-Kee Lee, Do Young Rhee, Joon Sang Yu
Rok vydání:	2003
Předmět:	Distributed feedback laser Fabrication Materials science business.industry Grating Laser law.invention Optics Etching (microfabrication) law Optoelectronics Dry etching Reactive-ion etching business Diffraction grating
Zdroj:	International Conference onIndium Phosphide and Related Materials, 2003..
DOI:	10.1109/iciprm.2003.1205421
Popis:	We developed dry etching for the fabrication of DFB lasers. Most of all, effects of dry etching conditions such as rf power and etch mask materials on the etching properties and overgrown active layers were investigated. Device characteristics and long-term stability of DFB laser fabricated by using a dry etched grating were also measured.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5380e0d2556b201af2ef0faa8b525f2e https://doi.org/10.1109/iciprm.2003.1205421 Zobrazit plný text záznamu