Ion bombardment effect on properties of MoO thin film under different PEALD plasma exposure time

Autor:	Chun-Hui Bao, Chen Wang, Ming-Jie Zhao, Wan-Yu Wu, Chia-Hsun Hsu, Xiao-Ying Zhang, Dong-Sing Wuu, Shui-Yang Lien, Wen-Zhang Zhu
Rok vydání:	2022
Předmět:	Condensed Matter Physics Instrumentation Surfaces Coatings and Films
Zdroj:	Vacuum. 200:111025
ISSN:	0042-207X
DOI:	10.1016/j.vacuum.2022.111025
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::536ed7ce1c59bc1f7c7a4a2fc1288f10 https://doi.org/10.1016/j.vacuum.2022.111025 Zobrazit plný text záznamu Full Text from ScienceDirect