Electromagnetic actuation dual-chamber bidirectional flow micropump
| Autor: | Pei Ling Leow, Mqa Rusli, Rashidah Arsat, Pei Song Chee, Khai Xin Lau |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Microchannel
Materials science Computer simulation Controller (computing) 010401 analytical chemistry Metals and Alloys Micropump Mechanical engineering 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Chip 01 natural sciences 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials Volumetric flow rate law.invention Printed circuit board law Electrical and Electronic Engineering Photolithography 0210 nano-technology Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 282:17-27 |
| ISSN: | 0924-4247 |
| Popis: | This paper presents the design and development of a dual-chamber microchannel chip, coupled with an electromagnetic actuator for a bidirectional flow micropump system. A rapid prototyping technique is reported for the fabrication of the membrane sheet (a spin coater machine technique), microchannel chip (a photolithography technique) and controller system (a wet etching method to the circuit board), decreased development time by allowing correction and evaluation of the micropump to be made early in the process. To achieve a bidirectional flow, a dispersing depth was implemented between the microchannel chamber and inlet/outlet channel. From the numerical simulation and experimental analysis obtained, the micropump was capable for bidirectional flow application with the maximum volumetric flow rate of the fabricated micropump system at zero backpressure is 1.1254 ± 0.0658 μLs−1 (forward direction) and 1.1266 ± 0.0760 μLs−1 (reversed direction). The power consumption for the developed micropump system is 48.64 mW. |
| Databáze: | OpenAIRE |
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