Critical parameters in the single‐target sputtering of YBa2Cu3O7

Autor:	T. T. Braggins, J. R. Gavaler, J. Greggi, M.G. Forrester, J. Talvacchio
Rok vydání:	1991
Předmět:	High-temperature superconductivity Materials science Transition temperature Inorganic chemistry Analytical chemistry General Physics and Astronomy Sputter deposition law.invention Sputtering law Deposition (phase transition) Thin film Spectroscopy Stoichiometry
Zdroj:	Journal of Applied Physics. 70:4383-4391
ISSN:	1089-7550 0021-8979
Popis:	The critical parameters in the single‐target magnetron sputtering of YBa2Cu3O7 have been identified and sufficiently optimized to allow the reproducible deposition of films with Tc’s of ≳90 K and Jc’s of ≫ 106 A/cm2 at 77 K. It was found that during film growth the bombardment of the YBa2Cu3O7 by energetic particles must be minimized and also a stronger oxidizing agent than molecular oxygen must be present to obtain films with these properties. Otherwise, films are deposited that, by x‐ray diffraction and energy dispersive x‐ray spectroscopy analyses, are indistinguishable from the highest‐Tc 1:2:3 stoichiometric material but which have critical temperatures of ≪90 K. Films need not have 1:2:3 overall stoichiometry to have optimum superconducting properties. In such cases the excess elements are present as second‐phase particles.
Databáze:	OpenAIRE
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