Low-insertion loss submicron Ta2O5 channel waveguide with inverse taper structure

Autor:	Yuan-Yao Lin, Chao-Kuei Lee, Wei-Chen Tien, Ann-Kuo Chu, Bo-Tsang Chen, Chung-Lun Wu, Yi-Jen Chiu
Rok vydání:	2015
Předmět:	Coupling loss Materials science business.industry Annealing (metallurgy) Surface roughness Insertion loss Optoelectronics Inverse Magnetic films Sputter deposition business
Zdroj:	2015 IEEE Photonics Conference (IPC).
DOI:	10.1109/ipcon.2015.7323692
Popis:	The crack-free and low surface roughness of Ta 2 O 5 film has been deposited by magnetron sputtering technique. The propagation loss of 1.5 dB/cm with the total coupling loss of 3.2 dB for the Ta 2 O 5 based channel waveguide with inverse taper structure has been successfully demonstrated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::533a9815fa06ae8bed2f4c1e94e28060 https://doi.org/10.1109/ipcon.2015.7323692 Zobrazit plný text záznamu