The Impact of Polysilicon Gate Doping on the Low Frequency Noise of MOS Transistors

Autor: Eleftherios G. Ioannidis, Friedrich P. Leisenberger, Karl Rohracher, Rainer Minixhofer
Rok vydání: 2022
Předmět:
Zdroj: Fluctuation and Noise Letters. 21
ISSN: 1793-6780
0219-4775
Popis: New results are presented for the low frequency noise (LFN) characterization of N-MOS and P-MOS from a standard CMOS technology node. The impact of n[Formula: see text] and p[Formula: see text] polysilicon gate doping on the LFN for N-MOS and P-MOS devices has been investigated. The results demonstrate that the higher p[Formula: see text] poly doping of the P-MOS improves the noise performance up to a factor of six. The N-MOS device with higher n[Formula: see text] poly doping shows no significant change in the LFN level. It is interesting to note that the effective Coulomb scattering prefactor [Formula: see text] increased for both devices.
Databáze: OpenAIRE