Fundamentals and future applications of Laser Voltage Probing

Autor: Ulrike Kindereit
Rok vydání: 2014
Předmět:
Zdroj: 2014 IEEE International Reliability Physics Symposium.
DOI: 10.1109/irps.2014.6860635
Popis: This paper will give an overview of the history of Laser Voltage Probing, explain the physical background of the signal generation process, provide insight into various detection schemes and measurement methods that were and currently are used in the industry and discuss challenges for future technology nodes and highlight development areas.
Databáze: OpenAIRE