| Autor: |
Naoki Yamamoto, Hisao Makino, Aki Miyake, Motohiko Yoshida, Takahiro Yamada, Yoshinori Hirashima, Takahiro Itoh, Hidehiro Morita, Hiroaki Iwaoka, Tetsuya Yamamoto, Hitoshi Hokari |
| Rok vydání: |
2009 |
| Předmět: |
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| Zdroj: |
SID Symposium Digest of Technical Papers. 40:1103 |
| ISSN: |
0097-966X |
| DOI: |
10.1889/1.3256477 |
| Popis: |
Electrical properties and thermal stability of Ga-doped ZnO (GZO) films were examined in light of the application to transparent common electrodes in thin film transistor liquid crystal displays (TFT-LCDs). Durable thermal stability of GZO films prepared by magnetron sputtering or ion plating was confirmed for 30 minutes at post annealing temperatures of 230 °C. Feasibility of the GZO transparent common electrodes has been examined thorough practical fabrication and field test of TFT-LCD utilizing the GZO films prepared by magnetron sputtering. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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