Growth and Characterization of ZnO and Al-Doped ZnO Thin Films by a Homemade Spray Pyrolysis

Autor:	B. Rahal, Y. Larbah, M. Adnane
Rok vydání:	2020
Předmět:	010302 applied physics Auger electron spectroscopy Materials science medicine.diagnostic_test Doping 02 engineering and technology 021001 nanoscience & nanotechnology Condensed Matter Physics Microstructure 01 natural sciences Atomic and Molecular Physics and Optics Grain size Electronic Optical and Magnetic Materials Chemical engineering Spectrophotometry 0103 physical sciences medicine Crystallite Thin film 0210 nano-technology Wurtzite crystal structure
Zdroj:	Semiconductors. 54:1439-1444
ISSN:	1090-6479 1063-7826
DOI:	10.1134/s1063782620110184
Popis:	In this work, we have prepared the undoped and Al-doped ZnO thin films by a homemade spray pyrolysis method at 450°C onto glass substrates. The X-ray diffraction patterns of undoped ZnO and aluminized zinc-oxide (AZO) thin films exhibit hexagonal wurtzite crystal structure with high crystalline quality, the crystallite size is nanometric. The morphology of the undoped and Al-doped ZnO thin films also indicate that all samples have a nanoscale grain size around 50 nm, and the microstructure of ZnO films is highly influenced by the aluminum doping. The two films are characterized by UV-visible spectrophotometry showing that the films have a whole optical transmission above 85% in the visible range. The composition of our films is obtained by energy dispersive spectrum, confirmed by Auger electron spectroscopy (AES) and by Rutherford back-scattering spectrometry (RBS) techniques.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::52e41f439a8faaaa0b0edc2da53cece2 https://doi.org/10.1134/s1063782620110184 Zobrazit plný text záznamu Plný text ve formátu PDF Plný text ve formátu HTML
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