| Autor: |
Anna Gorecka-Drzazga, Piotr Szyszka, Tomasz Grzebyk, Jan Dziuban, Ch. Lee, Dihan Hasan, M. Bialas |
| Rok vydání: |
2019 |
| Předmět: |
|
| Zdroj: |
2019 19th International Conference on Micro and Nanotechnology for Power Generation and Energy Conversion Applications (PowerMEMS). |
| DOI: |
10.1109/powermems49317.2019.92321112609 |
| Popis: |
This paper presents the concept of a MEMS mass spectrometer, which integrates all necessary modules on a single vacuum-sealed chip: a high vacuum micropump, a sample injection system, an ion source, an analyzer and a detector. Our MEMS mass spectrometer chip is fabricated using monocrystalline silicon and borosilicate glass substrates has dimensions of $10 \times 10 \times35$ mm 3 and internal volume of 0.45 cm 3. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
|
