Sensitive and Selective Photoacoustic Gas Sensor Suitable for High-Volume Manufacturing

Autor: Alain Ferber, Ralph W. Bernstein, Henrik Rogne, Martin Lloyd, Dag Thorstein Wang, S.T. Moe, Kari Schjølberg-Henriksen, Olaf Schulz, Karl-Heinz Suphan, Gerhard Müller
Rok vydání: 2008
Předmět:
Zdroj: IEEE Sensors Journal. 8:1539-1545
ISSN: 1530-437X
DOI: 10.1109/jsen.2008.923588
Popis: Sensitive and selective gas measurements are crucial for a large variety of applications. This paper describes the manufacturing and characterization of a photoacoustic gas sensor system. The system is based on a pressure sensor element with a sensitivity of 10 muV/V/Pa. To demonstrate and evaluate the concept, 12 prototypes for measuring CO2 have been manufactured and characterized. Detection limits ranging from 92 ppm to below 6 ppm CO2 were obtained with a path length of 10 cm, depending on the measurement time and photoacoustic cell design. Measurements showed no cross-sensitivity towards CO, CH4, or humidity in any of the sensors. The temperature drift of the uncompensated raw signal of two sensor designs was below 117 ppm CO2 in the range from 25degC to 50degC.
Databáze: OpenAIRE