Planar Optical Waveguides Based on Thin ZnO Layers
| Autor: | E. Łusakowska, Przemyslaw Struk, M. Ekielski, K. Gut, Tadeusz Pustelny, A. Piotrowska, Krystyna Gołaszewska, Iwona Pasternak, Eliana Kamińska |
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| Rok vydání: | 2009 |
| Předmět: | |
| Zdroj: | Acta Physica Polonica A. 116:414-418 |
| ISSN: | 1898-794X 0587-4246 |
| DOI: | 10.12693/aphyspola.116.414 |
| Popis: | Zinc oxide ZnO is a semiconductor material with a wide broad-band gap of 3.4 eV. It displays attractive properties permitting to apply it in sensor techniques as well as in systems of integrated optics. Data quoted in literature indicate that it is transparent in a visible range. It is characterized by a high value of the refractive index (n ≈ 2) [1–6], which is a favorable feature of the waveguide in systems of integrated optics [3]. The primary aim of the investigations is to develop in future a photonic sensor structure attained in compliance with the techniques of integrated optics applied as sensors of selected gases, e.g. NH3, NOx, . . . Gas sensors constructed on the basis of integrated optics are particularly desirable in environments liable to considerable hazards of explosion, i.e. in industry [1]. An innovation of the solution suggested by us is the construction of a sensor structure in compliance with the techniques of integrated optics, comprising a waveguide layer, a sensor layer and input-output elements, viz. Bragg’s gratings, all mounted on common substrate. The subject matter of the present paper is to investigate the optical waveguide properties of ZnO layers depending on the applied deposition technology and their thermal treatments [7–18]. |
| Databáze: | OpenAIRE |
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