OS6(3)-10(OS06W0409) Characterization of Thin Films for MEMS Optical and Electrical Device Packaging Applications

Autor:	David F. Moore, Johnny H. He, P. Boyle, Matt A. Hopcroft
Rok vydání:	2003
Zdroj:	The Abstracts of ATEM : International Conference on Advanced Technology in Experimental Mechanics : Asian Conference on Experimental Mechanics. 2003:112
ISSN:	2424-2837
DOI:	10.1299/jsmeatem.2003.112
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::52562bf4470714eb08512cf2891fa837 https://doi.org/10.1299/jsmeatem.2003.112 Zobrazit plný text záznamu