Popis: |
A chemical vapor deposition (CVD) system for continuously coating fiber tows and monofilaments was designed, fabricated, and successfully operated. The fiber travels vertically up through the center of the gas injector and then through a hot wall CVD furnace. Fiber handling equipment is contained in gas-tight enclosures located above and below the reactor. The system is capable of operation at reduced pressure and has been used successfully for the deposition of YBa2Cu3O(x), BN, SiC, and other coatings. 38 refs. |