Silicon Device Backside De-Processing and Fault Isolation Techniques

Autor:	Yunfei Wang, Prasoon Joshi, Wen-hsien Chuang, Di Xu, Ma Zhiyong, Steven R. Cook, Shuai Zhao, Piyush Vivek Deshpande, Jennifer Huening, Hyuk Ju Ryu, Xianghong Tom Tong
Rok vydání:	2019
Předmět:	Materials science Silicon chemistry business.industry chemistry.chemical_element Optoelectronics business Fault detection and isolation
DOI:	10.31399/asm.tb.mfadr7.t91110323
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5226f0f86b4b685beb093ab2814dc286 https://doi.org/10.31399/asm.tb.mfadr7.t91110323 Zobrazit plný text záznamu