Next Generation of Highly Miniaturized Bulk-Mems Fabry-Pérot Filters For Infrared Microspectrometers
| Autor: | Steffen Kurth, Karla Hiller, Martin Ebermann, Marco Meinig, Norbert Neumann, Jan Seiler, Silke Hoppe, Christian Helke |
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| Rok vydání: | 2019 |
| Předmět: |
Microelectromechanical systems
Materials science business.industry Detector 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences 010309 optics Acceleration 0103 physical sciences Miniaturization Optoelectronics 0210 nano-technology business Throughput (business) Sensitivity (electronics) Fabry–Pérot interferometer Voltage |
| Zdroj: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| Popis: | This paper reports on the progress in miniaturization of bulk micromachined FP filters and tunable detector modules for the mid infrared. The chip size was reduced from 7×7 mm² to 5×5 mm², enabling integration into TO5-size detector packages, which is about only one quarter of the formerly used TO8. At the same time a high optical throughput is maintained. A MEMS design with two movable reflectors is used, which allows for lower actuation voltages and provides negligible acceleration sensitivity. |
| Databáze: | OpenAIRE |
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