Fast Positioning of Cutting Tool by a Voice Coil Actuator for Micro-Lens Fabrication

Autor: Young Jin Noh, Wei Gao, Masayuki Nagashima, Yoshikazu Arai
Rok vydání: 2009
Předmět:
Zdroj: International Journal of Automation Technology. 3:257-262
ISSN: 1883-8022
1881-7629
DOI: 10.20965/ijat.2009.p0257
Popis: This paper describes the design, characteristics evaluation and experiment of a fast tool positioning (FTP) unit driven by a voice coil actuator. Three types of springs for coupling the actuator and the cutting tool, are compared for displacement constant, stiffness, and dynamic response based results of theoretical analysis and experiments. Micro-lens fabrication experiments on an aluminum alloy workpiece are conducted using the FTP with a disc spring, which has a displacement constant of approximately 100 μm/A, a bandwidth of approximately 273 Hz, and a Z direction stiffness of 210 mN/μm.
Databáze: OpenAIRE