Simulation based sensitivity analysis and optimization of Scatterometry measurements for future semiconductor technology nodes

Autor:	Wolfgang Osten, Laszlo Sziksai, Thomas Schuster, Christoph Hohle, Karsten Frenner, Manfred Mört, Valeriano Ferreras Paz, Harald Bloess
Rok vydání:	2009
Předmět:	Semiconductor technology Computer science Electronic engineering Sensitivity (control systems) Simulation based
Zdroj:	Fringe 2009 ISBN: 9783642030505
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::51e1c7379f147831c217c866d3fe9190 https://doi.org/10.1007/978-3-642-03051-2_101 Zobrazit plný text záznamu