On the Precision Preparation of Samples for Atom Probe Tomography Using a Focused Ion Beam in a SEM
| Autor: | S. V. Rogozhkin, V. V. Khoroshilov, O. A. Korchuganova, O. A. Raznitsyn, A. A. Lukyanchuk, A. A. Aleev |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Scanning electron microscope business.industry 02 engineering and technology Atom probe engineering.material 021001 nanoscience & nanotechnology 01 natural sciences Focused ion beam Atomic units Surfaces Coatings and Films law.invention Coating law 0103 physical sciences engineering Optoelectronics Sample preparation Tomography Thin film 0210 nano-technology business |
| Zdroj: | Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 12:87-93 |
| ISSN: | 1819-7094 1027-4510 |
| Popis: | Atom probe tomography is a modern and dynamically developing method of material investigation. It allows studies of the structure of matter at the atomic scale. The physical fundamentals of this method require a specific size, shape and conductivity type of the sample. To expand the analytical capabilities of atom probe tomography, a technique for preparing samples using a focused ion beam in a scanning electron microscope is studied and implemented in this work. The basic principles of this approach are demonstrated; its advantages, disadvantages and important practical aspects are described. To protect a fabricated sample from the influence of environment upon its transport to an atom probe tomograph, it is suggested a platinum coating be used. The atom-probe-tomography analysis of samples prepared with a focused ion beam is carried out. The effects of using such a sample preparation technique are studied. |
| Databáze: | OpenAIRE |
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