Integral Resonant Control of a Piezoelectric Tube Actuator for Fast Nanoscale Positioning

Autor:	B. Bhikkaji, S.O. Moheimani
Rok vydání:	2008
Předmět:	Engineering Microscope business.industry Acoustics Vibration control Resonance Ranging Computer Science Applications law.invention Control and Systems Engineering law Control system Electronic engineering Electrical and Electronic Engineering Wideband business Actuator Quantum tunnelling
Zdroj:	IEEE/ASME Transactions on Mechatronics. 13:530-537
ISSN:	1941-014X 1083-4435
DOI:	10.1109/tmech.2008.2001186
Popis:	There is a need, in the wide ranging scientific community, to perform fast scans using scanning tunneling microscopes (STMs) and atomic force microscopes (AFMs) with nanoscale precision. In this paper, a piezoelectric tube of the type typically used in STMs and AFMs is considered. The resonant mode that hampers the fast scanning is identified and damped using a feedback control technique known as integral resonant control (IRC). The piezoelectric tube is then actuated to perform fast and accurate scans. IRC is a new feedback control technique suitable for damping highly resonant structures. Here, the IRC control technique is suitably modified to damp the resonance of a piezoelectric tube and achieve fast tracking of a wideband set point.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::51c352227ecdf4b8315e7e3f78c7c033 https://doi.org/10.1109/tmech.2008.2001186 Zobrazit plný text záznamu