Integrated Sagnac optical gyroscope sensor using ultra-low loss high aspect ratio silicon nitride waveguide coil
| Autor: | Taran Huffman, Minh A. Tran, Sarat Gundavarapu, Michael Belt, John E. Bowers, Tin Komljenovic, Daniel J. Blumenthal |
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| Rok vydání: | 2017 |
| Předmět: |
Silicon photonics
Materials science Optical fiber business.industry Optical polarization Gyroscope 02 engineering and technology Fibre optic gyroscope law.invention chemistry.chemical_compound 020210 optoelectronics & photonics Optics Silicon nitride chemistry law Electromagnetic coil 0202 electrical engineering electronic engineering information engineering business Waveguide |
| Zdroj: | SPIE Proceedings. |
| ISSN: | 0277-786X |
| Popis: | We demonstrate operation of an interferometric optical gyroscope that uses an on-chip 3m ultra-low-loss silicon nitride waveguide coil. The measured minimum waveguide loss of the waveguide coil fabricated using lithographic die stitching was 0.78 dB/m. The angle random walk and bias instability of the gyroscope were characterized to be 8.52 deg/hr1/2 and 58.7 deg/hr respectively. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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