Effect of Substrate Coupling on the Performance and Variability of Monolayer MoS2 Transistors

Autor: Abdullah G. Alharbi, Davood Shahrjerdi, Takashi Taniguchi, Kenji Watanabe, Zhujun Huang
Rok vydání: 2019
Předmět:
Zdroj: IEEE Electron Device Letters. 40:135-138
ISSN: 1558-0563
0741-3106
DOI: 10.1109/led.2018.2883808
Popis: We study the effect of substrate coupling on the variability and the device characteristics of monolayer MoS2 field-effect transistors (FETs). Our electrical measurement results reveal significant improvements of key FET device metrics and marked reduction of device variability with reducing the interfacial energy. We attribute the observed improvements of the device characteristics to the reduction of the interface trap density and the suppression of the charged impurity scattering. This study establishes the critical role of substrate coupling on the performance and variability of monolayer MoS2 FETs.
Databáze: OpenAIRE