A spring‐guided micropositioner with linearized subnanometer resolution

Autor:	Kunitoshi Nishimura
Rok vydání:	1991
Předmět:	Materials science Spring (device) Acoustics Resolution (electron density) High resolution Nanotechnology Sensitivity (control systems) Instrumentation Piezoelectricity Displacement (vector)
Zdroj:	Review of Scientific Instruments. 62:2004-2007
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1142526
Popis:	A micropositioner consisting of flexure pivoted levers with a displacement amplifying mode to enhance displacement sensor sensitivity and a displacement reducing mode to achieve high resolution is described. The micropositioner is actuated by a piezoelectric driving element controlled by a closed‐loop servocircuit, and provides fast response and high repeatability. A successful application to STM is also described.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::51c167d4949cf8d0209c52664c139369 https://doi.org/10.1063/1.1142526 Zobrazit plný text záznamu