A Bipolar Vacuum Microelectronic Device
| Autor: | Brian R. Stoner, Jeffrey R. Piascik, Kristin H. Gilchrist, Charles B. Parker, Jeffrey T. Glass |
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| Rok vydání: | 2011 |
| Předmět: |
Microelectromechanical systems
Materials science Physics::Instrumentation and Detectors business.industry Bipolar junction transistor Electrical engineering Hardware_PERFORMANCEANDRELIABILITY Integrated circuit Cathode Computer Science::Other Electronic Optical and Magnetic Materials Anode law.invention law Hardware_INTEGRATEDCIRCUITS Microelectronics Optoelectronics Pentode Electronics Electrical and Electronic Engineering business |
| Zdroj: | IEEE Transactions on Electron Devices. 58:3189-3194 |
| ISSN: | 1557-9646 0018-9383 |
| Popis: | This report provides the first demonstration of a vacuum microelectronic device that utilizes both positive and negative charge states (i.e., a bipolar vacuum microelectronic device), thus enabling the possibility of device designs that are not previously possible in traditional vacuum microelectronics. In the same way that complimentary metal-oxide-semiconductor (complimentary n-channel MOS and p-channel MOS) were required in solid-state electronics before digital logic applications could be addressed, vacuum microelectronic devices benefit from a second charge state to realize many applications. This advance could enable integrated circuits for radiation-intensive environments (nuclear power facilities and space-based communications such as satellites) and high-temperature applications (engines and materials processing). A microelectromechanical systems platform was used to construct pentode structures with integrated carbon nanotube field emitters for electron emission and bias electrodes for separate electron- and ion-current modulation. Ions were generated via electron impact in an argon ambient, and devices were tested in both voltage sweep and pulsed modes. Current that is greater than 2 mA/cm2 was modulated at the anode between ion and electron collection, demonstrating that this novel platform has the potential to foster a new class of bipolar vacuum microelectronics. |
| Databáze: | OpenAIRE |
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