Modification of a low-soda easy-sintered α-Al2O3 powder for the application in semiconductor/display production equipment

Autor: Dang-Hyok Yoon, Min Ji Kang, Athiruban Sakthisabarimoorthi
Rok vydání: 2021
Předmět:
Zdroj: Korean Journal of Chemical Engineering. 38:2541-2548
ISSN: 1975-7220
0256-1115
Popis: Semiconductor and display production equipment requires highly plasma-resistant components, where α-Al2O3 plays a vital role in shielding and insulating. In the present study, the physicochemical properties of a new domestic α-Al2O3 powder were compared with those of imported ones currently used in the Korean industry. The particle size distribution revealed finer particles in the domestic powder that were generated during dry milling than the imported powder resulting in a broad size distribution and high surface area. An effort was made to eliminate the fine particles by heat treatment because they increase the viscosity of a slurry for wet processing and induce a low green and sintered density of the final products. In addition to the effects of heat treatment on the powder characteristics, the dispersion behavior of an aqueous Al2O3 slip was examined systematically upon the addition of each polymeric processing additive for filter pressing.
Databáze: OpenAIRE
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