S1310101 Development of Rotary Grinding Machine for 450mm Si Wafer : Positioning accuracy of wheel spindle which creates both rotary and axial feed motions
| Autor: | Jumpei Kusuyama, Alexander H. Slocum, Akinori Yui, Shintaro Iwahashi, Takayuki Kitajima, Hirotsugu Saito, Ayumu Honda |
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| Rok vydání: | 2015 |
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| Zdroj: | The Proceedings of Mechanical Engineering Congress, Japan. 2015:S1310101 |
| ISSN: | 2424-2667 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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