MEMS device for bending test: measurements of fatigue and creep of electroplated nickel
| Autor: | Anette Alsted Rasmussen, Kristian Pontoppidan Larsen, Morten Ginnerup, Ole Hansen, Jan Tue Ravnkilde |
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| Rok vydání: | 2003 |
| Předmět: |
Microelectromechanical systems
Toughness Materials science business.industry Metals and Alloys Bending Particle displacement Structural engineering Condensed Matter Physics Nanocrystalline material Finite element method Computer Science::Other Surfaces Coatings and Films Electronic Optical and Magnetic Materials Condensed Matter::Materials Science Creep Electrical and Electronic Engineering Composite material business Electroplating Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 103:156-164 |
| ISSN: | 0924-4247 |
| Popis: | In situ bending test devices with integrated electrostatic actuator were fabricated in electroplated nanocrystalline nickel. The device features approximately pure in-plane bending of the test beam. The excitation of the test beam has fixed displacement amplitude as the actuation electrodes are operated to pull-in. The device was fabricated with different lengths of the test beam ranging from 7 to 30 μm. Maximum stresses in the test beams were calculated to be ranging from 470 to 2100 MPa using finite element methods (FEM). Life tests were performed, where the development of the pull-in voltages was monitored. The test results indicate good fatigue properties of nanocrystalline nickel. The results also indicate considerable creep activity at room temperature. A combination of high strength and toughness, which is known for nanocrystalline materials, could be the explanation for the good fatigue properties. |
| Databáze: | OpenAIRE |
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