Effect of corona discharge on formation of holographic diffraction gratings in the Cu–As2Se3 thin-film structure
| Autor: | G. M. Tridukh, A. M. Prisakar, Mihail Iovu, A. M. Nastas |
|---|---|
| Rok vydání: | 2017 |
| Předmět: |
010302 applied physics
endocrine system Materials science genetic structures Physics and Astronomy (miscellaneous) business.industry Holography 02 engineering and technology Photoresist 021001 nanoscience & nanotechnology Diffraction efficiency 01 natural sciences Isotropic etching law.invention Optics law 0103 physical sciences Optoelectronics Irradiation Thin film 0210 nano-technology business Diffraction grating Corona discharge |
| Zdroj: | Technical Physics. 62:1403-1406 |
| ISSN: | 1090-6525 1063-7842 |
| DOI: | 10.1134/s1063784217090195 |
| Popis: | Application of negative corona discharge in the course of recording leads to an increase in the holographic sensitivity of the Cu–As2Se3 structure and diffraction efficiency of the recorded holographic gratings and the relief gratings fabricated with the aid of chemical etching. Positive corona discharge impedes the recording of holographic gratings in the Cu–As2Se3 structure. The Cu–As2Se3 structure exhibits the properties of a negative photoresist under irradiation in the presence of the negative corona discharge. In addition, the dissolution selectivity substantially increases due to the corona discharge. |
| Databáze: | OpenAIRE |
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