New analytical technique for characterization of thin films using surface plasmon resonance

Autor:	Kyle S. Johnston, Sinclair S. Yee, Chuck C. Jung, Scott R. Karlsen
Rok vydání:	1995
Předmět:	business.industry Chemistry Surface plasmon Analytical technique Resonance Condensed Matter Physics Characterization (materials science) Optics General Materials Science Surface plasmon resonance Thin film business Realization (systems) Refractive index
Zdroj:	Materials Chemistry and Physics. 42:242-246
ISSN:	0254-0584
DOI:	10.1016/0254-0584(95)01659-i
Popis:	A theoretical technique is presented for simultaneously determining the thickness and dispersive refractive index of a homogeneous thin film applied to a surface plasmon resonance sensor. The technique has the potential for real-time characterization of film parameters while immersed in air, vacuum or liquid media. Experimental realization requires a calibrated wavelength-modulated surface plasmon resonance sensor that is measured at several angles of illumination. A fine-tuned numerical model is used to generate general solutions that describe the sensor response for each angle of illumination. A differential technique and an assumption of a linear dispersion are used to produce a unique solution for the thickness and dispersive refractive index of the film. For a simulated 183 nm thick glass film, results shows 1% thickness prediction error and refractive index prediction error on the order of 3 × 10−3.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5061afdc60190312e1fcf852976d6bf5 https://doi.org/10.1016/0254-0584(95)01659-i Zobrazit plný text záznamu Full Text from ScienceDirect