Metal Salt Solution-Nanoprecipitation Method for Improvement in Reliability of Sintered Ag Nanoparticle Bonding

Autor: Tetsuya Yamamoto, Tsuyoshi Sato, Akihiro Sasaki, Daisuke Hiratsuka, Tomohiro Iguchi
Rok vydání: 2015
Předmět:
Zdroj: International Symposium on Microelectronics. 2015:000669-000674
ISSN: 2380-4505
Popis: Interest in die-attach materials with high thermostability has been stimulated by the high junction temperature of power semiconductors. Sintered Ag nanoparticle bonding is the most attractive candidate for use as solder because of its high melting point (1253 K) and low process temperature (~573 K). Recent studies have assumed that this bonding exhibits high thermostability above 573 K. However, in fact, it is difficult to preserve the bonding strength after high-temperature storage at 523 K for 1000 h. Thus, we first clarified that the sintered Ag nanoparticle bonding was degraded by micropore coalescence caused by the Ag grain growth. We then developed the metal salt solution-nanoprecipitation (MS2NP) method for improving the reliability of the sintered Ag nanoparticle bonding. We found that the bonding used by the MS2NP method can maintain a high die-shear strength (~40 MPa) even after high-temperature storage at 573 K for 1000 h.
Databáze: OpenAIRE