TiN in work function type sensors: a stable ammonia sensitive material for room temperature operation with low humidity cross sensitivity
| Autor: | Maximilian Fleischer, Bernhard Ostrick, Hans Meixner, Roland Pohle |
|---|---|
| Rok vydání: | 2000 |
| Předmět: |
Work (thermodynamics)
Diffuse reflectance infrared fourier transform Inorganic chemistry Metals and Alloys Analytical chemistry Humidity chemistry.chemical_element Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ammonia chemistry.chemical_compound Adsorption chemistry Materials Chemistry Relative humidity Work function Electrical and Electronic Engineering Tin Instrumentation |
| Zdroj: | Sensors and Actuators B: Chemical. 68:234-239 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/s0925-4005(00)00434-2 |
| Popis: | In this work, it was found that exposure of TiN to ammonia (400 ppb–100 ppm) in wet synthetic air at room temperature leads to a reversible decrease of Δ Φ . There is a change of the work function of −30 meV/decade of increasing ammonia concentration at room temperature. The response time ( t 90 ) to 1 ppm is ≤1 min. The sensitivity is a typical room temperature effect as it decreases at higher temperatures up to 100°C. The reaction has a low cross sensitivity to humidity, as — first — the sensitivity to ammonia does not depend on the relative humidity and — second — the work function change due to humidity changes is as low as −2 meV for an increase of 10% in relative humidity. The Diffuse Reflectance Infrared Fourier Transform Spectra (DRIFT-spectra) indicate that the adsorption of ammonia is correlated with a decrease of OH species on the surface. All data are compared to the gas reactions of TiO 2 . |
| Databáze: | OpenAIRE |
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