Ultra Low-kFilms Derived from Hyperbranched Polycarbosilanes (HBPCS)
Autor: | Jitendra S. Rathore, Geraud Dubois, Leonard V. Interrante |
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Rok vydání: | 2008 |
Předmět: | |
Zdroj: | Advanced Functional Materials. 18:4022-4028 |
ISSN: | 1616-3028 1616-301X |
DOI: | 10.1002/adfm.200801197 |
Popis: | Dense and porous hyperbranched carbosiloxane thin films (HBCSO) are obtained by sol-gel processing using methylene-bridged hyperbranched polycarbosilanes (HBPCSs) with the general compositional formula {(OMe) 2 Si(CH 2 )). Introduction of porosity is achieved using a porogen templating approach, allowing the control of the films' dielectric constant from 2.9 to as low as 1.8. Over the entire dielectric range, the HBCSO films exhibit exceptional mechanical properties, 2-3 times superior to those obtained for non-alkylene bridged organosiloxanes such as methylsilsesquioxanes (MSSQs) of similar densities and k-values. |
Databáze: | OpenAIRE |
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