Polishing of optoelectronic components made of monocrystalline silicon carbide

Autor:	A. G. Vetrov, Yu. D. Filatov, V. G. Poltoratskii, A. I. Borimskii, Tatiana Prikhna, V. D. Kurilovich, O. Yu. Filatov, A. M. Katsai, M. A. Danil’chenko, V. I. Sidorko, S. V. Kovalev
Rok vydání:	2015
Předmět:	Materials science Metallurgy Polishing Diamond engineering.material Carbide Inorganic Chemistry Monocrystalline silicon chemistry.chemical_compound Machining chemistry Boron nitride Surface roughness engineering General Materials Science Particle size
Zdroj:	Journal of Superhard Materials. 37:48-56
ISSN:	1934-9408 1063-4576
DOI:	10.3103/s1063457615010086
Popis:	The authors of this paper have substantiated the appropriateness of application of polishing suspensions of diamond micron powders, boron nitride and Ti3AlC2 MAX-phase powders in the study of the mechanism of polishing monocrystalline silicon carbide. They have proved suitability of using the following parameters as criteria for efficiency of the machining process: the specific value of the energy of transfer, the density of the energy of transfer, and the density of vibrational energy spent for the formation of debris particles. Computer modeling of the polished surface micro- and nanoprofile produced the profile charts from which the surface roughness parameters have been determined and the characteristic relations between the parameters and the most probable debris particle size have been defined.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4feb5746d68c00dde008ce152f139471 https://doi.org/10.3103/s1063457615010086 Zobrazit plný text záznamu Full text from SpringerLink