Cantilever probes for high speed AFM
| Autor: | C. Penzkofer, B. Irmer, W. Engl, C. Richter, T. Sulzbach, P. Weinzierl |
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| Rok vydání: | 2012 |
| Předmět: |
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Materials science Microscope Cantilever Fabrication business.industry Condensed Matter Physics Electronic Optical and Magnetic Materials law.invention symbols.namesake Scanning probe microscopy Optics Hardware and Architecture law Temporal resolution symbols Electrical and Electronic Engineering van der Waals force business Stylus |
| Zdroj: | Microsystem Technologies. 18:1119-1126 |
| ISSN: | 1432-1858 0946-7076 |
| Popis: | Since the invention in 1986 atomic force microscopy (AFM) has become the most widely used scanning probe microscopy (Binnig et al. in Phys Rev Lett 56:930–933, 1986). The microscope images the interaction of forces like Van der Waals or Coulomb forces between a sample and the apex of a small tip integrated near the free end of a flexible cantilever. But as all other scanning probe techniques the AFM requires serial data acquisition and suffers therefore from a low temporal resolution. Enhancing the speed to video rate imaging makes high demands on scanner technology, control electronics and on the key feature the cantilever with integrated sharp stylus. For the cantilever probes, fundamental resonance frequencies in the MHz regime are envisaged while the force constant of a few nN/nm shall be maintained. We present different novel AFM probes with ultrashort cantilevers and integrated sharp tips for high speed AFM while focusing on widely dispersed applications and on aspects of mass fabrication. |
| Databáze: | OpenAIRE |
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