| Autor: |
Kristofer S. J. Pister, Craig B. Schindler, Hani C. Gomez, Daniel Teal |
| Rok vydání: |
2021 |
| Předmět: |
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| Zdroj: |
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers). |
| DOI: |
10.1109/transducers50396.2021.9495446 |
| Popis: |
We report robust microfabricated MEMS electrostatic inchworm motors moving macroscopic objects: a motor in a $14.5\times 9.5\times 1.2\text{mm}$ gripper with 3mm displacement and 15mN force lifting a 1g weight, and an identical motor moving a 100mm long 230mg shuttle an 80mm distance horizontally at up to 5mm/s. This is an order of magnitude larger than previous electrostatic inchworm motors and demonstrates competitiveness with piezoelectric motors for millimeter-scale actuation for microrobotics. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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