Electrostatic force coupling of MEMS oscillators for spectral vibration measurements
| Autor: | Roman Forke, Thomas Gessner, Dirk Scheibner, Jan Mehner, Wolfram Dötzel |
|---|---|
| Rok vydání: | 2008 |
| Předmět: |
Physics
Spectrum analyzer Acoustics Superheterodyne receiver Metals and Alloys Resonance Condensed Matter Physics Signal Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention Vibration Resonator Coupling (physics) law Microsystem Electrical and Electronic Engineering Instrumentation |
| Zdroj: | Sensors and Actuators A: Physical. 142:276-283 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2007.04.004 |
| Popis: | Within this paper we present a new microsystem for frequency selective vibration monitoring in the frequency range below 1 kHz. The novel sensor is based on two force coupled oscillators, operating at standard pressure, which transform the low frequency vibration signal into a high frequency oscillation of a mechanical resonator. The resonator filters the desired spectral line by means of resonance amplification in a very small band. For the transformation we made use of the superheterodyne principle, known from communications engineering. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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