Improvement of conversion efficiency of multicrystalline silicon solar cells by incorporating reactive ion etching texturing
| Autor: | Weizhi Han, Deren Yang, Lu Wei, Zheng Jiayi, Quan Weijuan, Liu Shiyong, Xinwei Niu, Shan Wei, Haibin Duan, C.R. Wronski, Li Yunfeng |
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| Rok vydání: | 2014 |
| Předmět: |
Materials science
Silicon Renewable Energy Sustainability and the Environment business.industry Energy conversion efficiency chemistry.chemical_element Nanotechnology Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention chemistry.chemical_compound chemistry Silicon nitride Etching (microfabrication) law Solar cell Optoelectronics Wafer Reactive-ion etching business Sheet resistance |
| Zdroj: | Solar Energy Materials and Solar Cells. 127:21-26 |
| ISSN: | 0927-0248 |
| DOI: | 10.1016/j.solmat.2014.04.001 |
| Popis: | The reactive ion etching in combination with acidic etching (acidic+RIE) is applied to form the front surface texturing of 156×156 mm2 multicrystalline silicon (mc-Si) wafers in order to improve the cell efficiency. The scanning electron microscope (SEM) analyses indicate that the RIE process produces dense nanoscale ridge-like structures based on the acidic textured surfaces, and these structures generate an excellent antireflection effect. The matching processes including the post-cleaning, the phosphorus diffusion, and the deposition of silicon nitride (SiNX) antireflection coating are optimized. The acidic+RIE textured surfaces in combination with high sheet resistance emitters result in a remarkable enhancement in short wavelength response and then improve the short circuit current density (JSC) significantly. The absolute conversion efficiency of acidic+RIE textured solar cells is improved 0.51% on average compared to the acidic textured solar cells in mass production, and a maximum full-area cell efficiency of 18.49% is achieved on the mc-Si solar cell with a conventional cell structure. |
| Databáze: | OpenAIRE |
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