Nanolithography of Amorphous Vanadium Oxide Films Using an Atomic Force Microscope

Autor:	Aleksandr I. Komonov, Nikita D. Mantsurov, Sergey V. Mutilin, Bogdan V. Voloshin, Vladimir A. Seleznev
Rok vydání:	2022
Zdroj:	2022 IEEE 23rd International Conference of Young Professionals in Electron Devices and Materials (EDM).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4eac1aefbdba5119d18aa0a8854d3c08 https://doi.org/10.1109/edm55285.2022.9855164 Zobrazit plný text záznamu