Linear microvibromotor for positioning optical components

Autor:	Albert P. Pisano, Olav Solgaard, Richard S. Muller, Norman C. Tien, M. Daneman, Kam Y. Lau
Rok vydání:	1996
Předmět:	Materials science Silicon Mechanical Engineering Vibration source chemistry.chemical_element Linear motor Electrostatics Surface micromachining chemistry Q factor Electronic engineering Electrical and Electronic Engineering Actuator Voltage
Zdroj:	Journal of Microelectromechanical Systems. 5:159-165
ISSN:	1057-7157
Popis:	We report an electrostatically driven linear microvibromotor fabricated using surface-micromachining technology. This device is developed for use in actuated micro-optical systems on silicon. Its submicron positioning resolution and a travel range of over 350 /spl mu/m are excellent properties for this application. Vibromotor precision and velocity are characterized, and various drive methods are discussed. A simulation of the vibromotor dynamics is presented to explore optimization and control issues for this device.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4e60f8b1a09d3a36fa12699291c6db41 https://doi.org/10.1109/84.536622 Zobrazit plný text záznamu