Review of Development and Performance Evaluation of Active-matrix Nanocrystalline Si Electron Emitter Array for Massively Parallel Electron Beam Direct-write Lithography

Autor:	Kentaro Totsu, Takashi Yoshida, Nobuyoshi Koshida, Masanori Sugata, Naokatsu Ikegami, Hiroshi Miyaguchi, Shinya Yoshida, Masanori Muroyama, Akira Kojima, Masayoshi Esashi
Rok vydání:	2015
Předmět:	Materials science law Mechanical Engineering Cathode ray Nanotechnology X-ray lithography Electrical and Electronic Engineering Lithography Massively parallel Nanocrystalline material Electron gun Active matrix law.invention
Zdroj:	IEEJ Transactions on Sensors and Micromachines. 135:221-229
ISSN:	1347-5525 1341-8939
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4e5d0c530170e1bc8272a1f77b65f4f3 https://doi.org/10.1541/ieejsmas.135.221 Zobrazit plný text záznamu