High speed thin film thickness mapping by using dynamic spectroscopic imaging ellipsometry

Autor:	Daesuk Kim, Vamara Dembele, Sukhyun Choi, Gukhyeon Hwang, Saeid Kheiryzadehkhanghah, Inho Choi, Junbo Shim
Rok vydání:	2022
Zdroj:	Optical Technology and Measurement for Industrial Applications Conference 2022.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4e4e0f2a97711414fb5fc1a7afedd6f9 https://doi.org/10.1117/12.2660191 Zobrazit plný text záznamu