Piezoelectric properties and micro structures of lead titanate thin films for GHz-band bulk acoustic wave filters
| Autor: | Shusou Wadaka, Toshio Umemura, Takehiko Sato, Fusaoki Uchikawa, Akira Yamada, Chisako Maeda, Koichiro Misu |
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| Rok vydání: | 1998 |
| Předmět: |
Electromechanical coupling coefficient
Diffraction Materials science business.industry Sputter deposition Condensed Matter Physics Piezoelectricity Electronic Optical and Magnetic Materials Crystal chemistry.chemical_compound chemistry Control and Systems Engineering Electrode Materials Chemistry Ceramics and Composites Optoelectronics Lead titanate Electrical and Electronic Engineering Thin film business |
| Zdroj: | Integrated Ferroelectrics. 22:353-361 |
| ISSN: | 1607-8489 1058-4587 |
| DOI: | 10.1080/10584589808208055 |
| Popis: | The bulk acoustic wave filters at GHz bands were fabricated using lead titanate, PbTiO3 (PT) piezoelectric films which were deposited by RF magnetron sputtering and were oriented along crystal direction. To improve the quality of PT films, the bottom electrodes which had the Ti-diffusion suppressible layers were designed and prepared. X-ray diffraction intensity of the PT(111) became 5 times larger and degree of crystal orientation became 2 times stronger in comparison with those of the former PT films. The filters using the improved PT films had the insertion loss of -14dB. The PT film had effective electromechanical coupling coefficient (k) of 31% and electrical Q of 50. This k value was superior to those of well-known ZnO and AlN piezoelectric films. |
| Databáze: | OpenAIRE |
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