SIMS yields from glasses; secondary ion energy dependence and mass fractionation

Autor:	H. Odelius, A. Lodding, Ulf Södervall, E. Urban Engström
Rok vydání:	1987
Předmět:	Monatomic ion Isotope fractionation Sputtering Chemistry Analytical chemistry Nanochemistry Fractionation Atomic physics Kinetic energy Ion energy Analytical Chemistry Ion
Zdroj:	Mikrochimica Acta. 91:387-400
ISSN:	1436-5073 0026-3672
Popis:	SIMS studies of glasses indicate that calibration of positive monatomic ion yields via relative sensitivity factors (RSF) is significantly dependent both on the kinetic energyEk and on the massMt of the analyzed ions. Due to elemental differences in the energy distributions of the sputtered ions, relative emissivities at highEk are radically different from those at the tops of the distributions. While the RSF values of cations from glasses range within ca. 3 powers of ten, atEk above ca. 40 eV the range remains within a factor of ten or less, and further change of relative elemental sensitivities withEk is slow. At low exit energy the LTE formalism is reasonably well obeyed. At highEk, a trend is noted towards a relative suppression of the ion yields of lowvalent elements.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::4e49eea9be32f166db679ba929e46ab3 https://doi.org/10.1007/bf01199515 Zobrazit plný text záznamu Full text from SpringerLink