The nature of boron‐oxygen lifetime‐degrading centres in silicon

Autor: Vladimir V. Voronkov, Robert J. Falster
Rok vydání: 2016
Předmět:
Zdroj: physica status solidi c. 13:712-717
ISSN: 1610-1642
1862-6351
DOI: 10.1002/pssc.201600016
Popis: Light-induced degradation of minority carrier lifetime in silicon is caused by the formation of two B-O recombination centres: fast-stage centres (FRC) and slow-stage centres (SRC). FRC were concluded to emerge by a carrier-assisted reconfiguration of a latent BO2 defect composed of a substitutional boron atom and an oxygen dimer. The nature of SRC however remained uncertain; this defect appeared to involve an interstitial boron atom rather than a substitutional one. More recent data on SRC in boron-containing compensated p-Si and n-Si now show that the SRC actually emerge in the same way as FRC: by a reconfiguration of BO2, but from a different latent form. The two latent BO2 defects (the precursors for FRC and for SRC) are created during a cooling stage after the last high-temperature anneal, and their concentration, proportional to the boron concentration and squared oxygen concentration, depends on the cooling rate. (© 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)
Databáze: OpenAIRE